Wenesco Plates for Wafer Production

 

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                                           Hot plates  with

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vacuum chucks

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gas-tight covers for nitrogen or vacuum

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lift pins for contact or proximity baking

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heat-cool feature


Vacuum Chuck hot plates
 

Wenesco's hot vacuum chuck utilizes high uniformity heaters controlled with an accurate digital thermostat to assure even heating across the entire plate. The wafer is secured to the plate surface when air is suctioned out of the vacuum chuck. The temperature sensor, imbedded in the vacuum chuck, monitors and maintains the selected temperature, thus controlling the cure rate of fluid materials deposited on the substrate or wafer.

A hot vacuum chuck system may also include provisions for cooling the substrate after hardening, by shutting down the heat and directing a cooling gas flow towards the emulsion. This process integrates both the hardening and cooling operations and improves product throughput.

Other applications include probing, characterization, inspection and failure analysis of semiconductor wafers and chips, surface annealing, metal disposition, baking, and other material research.

The standard sizes of hot vacuum chucks range from 15mm to 600mm . Temperature ranges for standard models are available to 537C, with higher temperature limits available for custom hot chucks.
 

Our Standard drilled aluminum plates are flat to +/- .005 in. 
We can grind to +/- .00125 in. as an option.

Model HP66V hot plate with PV4 vacuum chuck

 

 

Model HP1212QPV3 hot plate, with four independent PV3  plate styles.  This feature is available with any plate style for chucks up to 24 x 24 in.

 

 

 

Model HP99V shown with optional pneumatic lift pins. The` pins can be actuated manually, or programmed using a time or temperature base.
  
 Lift pins are further explained near the bottom of this page

Vacuum Chuck Hot Plates

These versatile heated chucks provide a means for a simple, yet highly- controllable heat process for heating wafers to spec temperature during probing or testing.  All models feature a remote digital thermostat, which may be placed up to 32 in. from the plate. Set point and current temperature are digitally displayed in C or F, and temperature is held constant within 1% of set point.

This thermostat may be programmed in a wide range of ramp and soak profiles.  An optional com port allows you to communicate with the thermostat from your computer

An on-off valve is furnished for your vacuum supply. Vacuum rings and port are easily enabled or disabled with recessed set screws.

Wenesco 3-zone hot plate

Model HP4TV 3-zone vacuum chuck is designed for wet bench, proximity, or hard -bake process of semi-conductor wafers.

The operator of this unique vacuum chuck places the wafers on the raised lift pins, which are set for desired height and time cycle.  At the end of the cycle the wafers are lowered and sealed with the vacuum.  A buzzer signals the operator when the cycle is complete.

The plate material is anodized aluminum.  Electric and electronic systems are inside a hermetically-sealed stainless steel housing.  Each 4-inch diameter zone is controlled by its own programmable digital thermostat with a range of 29C-375C and temperature accuracy of 1% of set point.
 

V models with vacuum chuck, up to 400C     
Heat rise-20C per minute

Model

Plate size (in)

Overall size (in)*

Vacuum rings

Plate surface. Flat to .005 

power
 

HP66V

6 X 6

8 X 8 X 2 high

pv3 or pv4

Aluminum, anodized

120/240

HP99V

9 x 9

11 x 11 x 2

pv3 or pv4

aluminum, anodized

120/240

HP1212V

12 x 12

14 x 14 x 2

select

aluminum, anodized

120/240

HP1818V

18 X 18

20 x 20 x 2

select

aluminum, anodized

120/240

HP2424V

24 X 24

26 x 26 x 2

select

aluminum, anodized

240

HV models with vacuum chuck, up to 537C
Heat rise-25C per minute

Model

Plate size (in)

Overall size (in)*

Vacuum rings

Plate surface. Flat to .005 

Power
 

HP66HV

6 x 6

10 x 10 x 5

pv3 or pv4

Stainless 303

120/240

HP99HV

9 x 9

13 x 13 x 5

pv3 or pv4

Stainless 303

240

HP1212HV

12 x 12

16 x 16 x 5

select

Stainless 303

240

HP1818HV

18 x18

22 x 22 x 5

select

Stainless 303

240

HP2424HV

24 x 24

28 x 28 x 5

select

Stainless 303

240

 

NV Models with vacuum chuck and nitrogen hood, up to 400C
Heat rise-20C per minute

Model

Plate size (in)

Overall size (in)*

Vacuum rings

Plate surface. Flat to .005 

Max temp (C)

HP66NV

6 X 6

8 X 8 X10 high

pv3 or pv4

aluminum, anodized

400

HP99NV

9 x 9

11 x 11 x 10

pv3 or pv4

aluminum, anodized

400

HP1212NV

12 x 12

14 x 14 x 10

select

aluminum, anodized

400

HP1818NV

18 X 18

20 x 20 x 10

select

aluminum, anodized

400

HP2424NV

24 X 24

26 x 26 x 10

select

aluminum, anodized

400

 

HNV models with vacuum chuck and nitrogen hood, up to 537C
Heat rise-25C per minute

Model

Plate size (in)

Overall size (in)*

Vacuum rings

Plate surface. Flat to .005 

Max temp (C)

HP66HNV

6 x 6

10 x 10 x 12

pv3 or pv4

Stainless 303

537

HP99HNV

9 x 9

13 x 13 x 12

pv3 or pv4

Stainless 303

537

HP1212HNV

12 x 12

16 x 16 x 16

select

Stainless 303

537

HP1818HNV

18 x18

22 x 22 x 16

select

Stainless 303

537

HP2424HNV

24 x 24

28 x 28 x 16

select

Stainless 303

537


Plate style PV3


Plate style PV4


                Plate style PV6


             Plate style PV8

Standard vacuum ring patterns

Plate PV3
Dia in / mm

Plate PV4
Dia in /  mm

Plate PV6
Dia in /  mm

Plate PV8
Dia in /  mm

.75     (19.05)

.75     (19.05)

75     (19..05)

75     (19..05)

1.75   (44.45)

1.75   (44.45)

1.75   (44.45)

1.75   (44.45)

3.75   (95.25)

3.75   (95.25)

3.75   (95.25)

3.75   (95.25)

 

5.75   (146.05)

5.75    (146.05)

5.75    (146.05)

 

 

7.75    (196.85)

7.75    (196.85)

 

 

11.65    (295.91)

11.65    (295.91)
15.25   (387.35)
17.25   (438.15)
 

         

Chucks with gas-tight hoods, for nitrogen

Model HP1212HV is shown with a gas tight hood, fitted with a high temperature glass window. This fully insulated hood is 4 in above the heated chuck.

The vented base shown under the heated chuck housing contains a motorized lift pin assembly. Lift pin speed is controlled up and down.


 

 Interior view of motorized lift pin assembly. This version is controlled with a computer.


 

 

 

Temperature uniformity for model HP 1212V

ZONE

Zone size
inches

Set pt
100C

Set pt
200C

Set pt
300C

Set pt
400C

A

2.4 x 2.4

100

200

301

400

B

4.8 x 4.8

99

199

298

398

C

7.2 x 7.2

97

193

296

385

D

9.5 x 9.6

92

189

290

380

E

12 x 12

81

183

278

360

Model HP1818 NV, shown here, has a tall gas-tight hood with nitrogen gas entering from the top. Operations (Nitrogen flow on,off )( Heat on,off) (Hood up,down) , are controlled with an optional timer. The optional light tower displays activation of these functions. 
  T
he polished stainless steel plate is 18 x 18 inches, and  operates at 450C

Model HP66V, with nitrogen hood removed, is shown with style pv3 vacuum pattern. The plumbing delivers and retrieves coolant through tunnels machined in the chuck.

Chuck temperature is reduced from 300C to room temperature in approximately 25-30 minutes.
 

                              

Model H0909AA5AV21 includes a 9X9 inch vacuum chuck with a PV4 vacuum ring pattern,
The insulated hood is sealed to contain a nitrogen atmosphere which is introduced through diffuser ports.
   The four lift pins rate and position, are infinitely controlled using a stepper motor.
   Temperature is uniformly controlled with an accurate digital thermostat which may be accessed from your computer. The entire hot plate assembly is contained in a paneled stainless steel housing."

Model HP99VAC This 9X9" hot plate features an insulated hood ready for connection to your vacuum pump.  The hood is designed to hold a vacuum up to -25 PSI (1.72 bar)
 

Multi-Wafer Lift Pin Hot Plates

This model is designed for proximity and soft baking.  A computer manages the step motor, which raise and lowers up to 10 wafers in one cycle. Position, speed, and dwell are precisely controlled.

Process temperature is controlled with a digital thermostat up to 400C in a nitrogen environment. The cabinet and hood are made from stainless steel.

The heated anodized plate measures 18 x24 inches, and a vacuum hood is available for hard bake.

Click HERE to see the VIDEO.

       

 
Wenesco invites inquiries about customized hot plates in different sizes or with special temperature requirements and features.  Call or write us today about your unique needs.

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Please direct your inquiries and orders to our factory sales office.

Wenesco, Inc.,  4700 W. Montrose Avenue, Chicago, Illinois, 60641.
Telephone (773) 283-3004.   Toll-free: (800) 233-4430.  FAX: (773) 283-3787
Por Favor Comuniquese con Juan Hernandez : (773) 283-3004, ext 16

Contact Wenesco via  eMail or Form

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